Model | MSTech-M5VC(MStech) |
---|---|
Operating time | 09:00 ~ 18:00 |
Location | POSTECH Research Bldg. #112-2 |
inquiry |
Dr. Baek, Kangkyun 054-279-9949 k2baek@ibs.re.kr |
Explanation
The system can measure electric properties of various samples under ambient, vacuum, specific gas, low temperature, high temperature, and light irradiation conditions with high signal to noise ratio.
Specification
● M5VC
● Main chamber: 270 dia x 234 h, ISO 100 (Flenge for vacuum)
● Chuck: 70 mm Gold chuck, leakage current ≤ 1 fA,
● Vacuum: 10-3 torr
● Multi NW port: NW80 6 port, NW25 8 port, NW50 1 port
● Window: 100 mm quartz
● Temperature range: 77K ~ 570K
● Optical microscopy (Max : ~ 200X, range 0.67-5x)
● Probe tip: M5BG - 0.5 x 30 mm Gold Tungsten, ㎥BGHR – 0.5 x 30 mm Gold Tungsten
● Parameter analyzer(Keithley 4200)
- 2 medium power source-measure units, 1 ground unit
·current supply range: 100 mA to 100 nA
·resolution: 100 fA at 100 nA range
·operating voltage range: -200 V to 200 V
·resolution: 5 μV at 200 mV range
- 1 remote pre-amp
·Operating voltage range: -200 V to 200 V
·Current range: 10 nA to 1 pA
·Resolution limit: 1μV, 0.1 fA